Product features:
1. Adopting high-precision air floating guide rails and coreless linear motor drive
2. Micron level flatness and straightness
3. A self-developed multi axis motion control algorithm that achieves high positioning accuracy and repeatability
4. Gantry style dual drive structure design with strong load-bearing capacity
5. High resolution grating ruler signal feedback, achieving micrometer level positioning accuracy
6. Adopting modular and orthogonal design concepts, achieving high-precision and high stiffness linear motion with multiple axes
Product parameters:
Trip | 320mm (customizable) |
Maximum speed | 1m/s |
Maximum acceleration | 10m/s² |
Flatness | ±2um |
Straightness | ±1um |
Positioning accuracy | ± 0.2um (after calibration compensation) |
Repetitive positioning accuracy | ±0.1um |
Maximum load | 20Kg |
Raster scale resolution | 0.1um |
Pressure | 0.4～0.5Mpa |
Application area | Suitable for high-end industries such as semiconductor processing and measurement, ultra precision machining, optical testing, and micro/nano processing |
Long Press to Scan QR Code
Scan QR Code
