Product features:

1. The entire system is fully independently produced to meet the customized needs of users

2. Standard Load Port universal device, designed to comply with SEMI standards, with excellent versatility and compatibility

3. Equipped with a self-developed Wafer Mapping system, it can achieve detection of wafer presence, absence, stacking, tilting, etc

4. Diversified functional configuration options, flexible adaptation to multiple working conditions

5. Standardized communication ports that can expand multiple communication and docking methods

Product parameters: