Product features:
1. Adopting high-precision air floating guide rails and coreless linear motor drive
2. High stability granite abutment
3. Built in 0.1um high-resolution grating ruler sensor
4. Excellent positioning accuracy and dynamic performance
5. Equipped with ultra-high flatness and straightness
6. Multiple specifications and models are available for customization as needed
Product parameters：
Effective Travel | 1000mm (customizable) |
Continuous thrust | Continuous 220N; Peak 440N |
Maximum speed | 2m/s |
Acceleration | 4m/s² |
Straightness | ≤1um |
Flatness | ≤1um |
Positioning accuracy | ±1um |
Repetitive positioning accuracy | ±0.5um |
Rated load | 15Kg |
Raster scale resolution | 0.1um |
Pressure | 0.5Mpa |
Application area | Suitable for high-end industries such as semiconductor processing and measurement, ultra precision machining, high-precision optical scanning, optical testing, etc |
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