Product features:
1. Adopting high-precision air floating guide rails and coreless linear motor drive
2. Precision large and medium air floating rotary table with a diameter of 320mm
3. Micron level flatness and straightness
4. A self-developed multi axis motion control algorithm that achieves high positioning accuracy and repeatability
5. High resolution grating ruler signal feedback, achieving micrometer level positioning accuracy
6. Adopting modular and sunken design, achieving high-precision, high stiffness linear motion with multiple axes and compact structural layout
Product parameters:
Trip | 350mm (customizable) |
Rotating table diameter | 310mm |
Maximum speed | 1m/s |
Maximum acceleration | 10m/s² |
Flatness | ±1um |
Straightness | ±0.5um |
Positioning accuracy | ± 0.2um (after calibration compensation) |
Repetitive positioning accuracy | ±0.1um |
Maximum load | 30Kg |
Raster scale resolution | 0.1um |
Pressure | 0.4～0.5Mpa |
Application area | Suitable for high-end industries such as semiconductor processing and measurement, ultra precision machining, optical testing, and micro/nano processing |
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