Product features:
1. Adopting large load and high-precision enclosed air bearing
2. Non contact torque motor drive with high dynamic response
3. High precision optical linear encoder signal feedback ensures high-precision positioning
4. Nano level axial and radial jump accuracy, with higher repeatability accuracy
5. Built in high-resolution grating ruler sensor
6. Multiple specifications and models to choose from
Product parameters:
Table diameter | 80mm-150mm (customizable) |
Maximum speed | 500—800rpm |
Positioning accuracy | ±1.5 arc sec |
Bidirectional repetition accuracy | ±1 arc sec |
Maximum load | Axial 70Kg; Radial 30kg |
Axial error | ＜100nm |
Radial error | ＜200nm |
Swing angle error | <3urad |
Raster scale resolution | 0.1um |
Pressure | 0.5Mpa |
Application area | Suitable for high-end industries such as semiconductor processing and measurement, ultra precision machining, high-precision metrology, optical testing, and nanoscale equipment |
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