Product features:
1. The entire system is fully independently produced to meet the customized needs of users
2. The design complies with SEMI standards and has good versatility and compatibility
3. The internal structure design is compact and reasonable, supporting customized customer needs
4. The core components are all independently developed, with good stability and strong versatility
5. Standardized and modular design, compatible with various working conditions requirements
Product parameters:
Structure size | 1480mm * 980mm * 2090mm |
Cleanliness level | Class 1 |
Position accuracy | ±0.1m |
Mount Port | 2-3 ports (customizable) |
Load Port | Cassette type |
End effector | Vacuum/edge clamping/Bernoulli non-contact |
Applicable wafer materials | Monocrystalline silicon/silicon carbide, etc |
Wafer specifications | 100mm to 300mm (4 inches to 12 inches) |
Mechanical arm | Double arm horizontal articulated arm |
Robot arm repeatability accuracy | ±0.1mm |
Supply voltage | single-phase AC200V ±10% ；50/60Hz ±5% |
Consumption current | 4kVA (20A/200VAC) FFU |
Dry air | 0.5Mpa ±10% |
Application area | Wafer loading and detection |
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