Product features:

1. The complete system is produced independently to meet the customized needs of users

2. The design complies with SEMI standards and has good versatility and compatibility

3. The core components are all independently developed, with good stability and strong versatility

4. Standardized and modular design, compatible with various working conditions requirements

5. The internal structure design is compact and reasonable, with unified interface standards to support customized customer needs

Service content:

1. Users can choose their own device components and customize the entire machine and system integration according to their needs

2. Design custom loading systems and modules as needed (Load Port custom design)

3. Design of wafer transfer system (customized design of EFEM transfer system)

4. Customized handling robots, end effectors, wafer calibrators, etc. as needed

5. Customized design of high-precision motion detection platform