Multiple manufacturing processes, including precision mechanical manufacturing, surface treatment special processes, welding, assembly, and testing, can meet strict standards. The main products include four categories: process components, structural components, module products, and gas pipelines, which are applied in semiconductor equipment, pan semiconductor equipment, and other fields.
►Linear module (with/without iron core)
►Air floating linear module
The air suspension linear module adopts a non iron core direct drive brushless linear motor and all air preloaded air suspension guide rail, thereby eliminating vibration and harmonic noise. It is also equipped with a grating ruler sensor, which can continuously output a thrust of up to 220N, with a maximum peak thrust of 440N. The module has excellent straightness and flatness, high stability, high positioning accuracy, and simple maintenance.
Application conditions:
Suitable for rapid positioning at the micrometer or even nanometer level, it can meet the requirements of high precision and high operational efficiency.
For example, precise positioning of handling and transmission in semiconductor wafers, photovoltaic cells, LCD panels and other equipment, as well as demanding working conditions such as high precision and stability, and small pitch and yaw angles required for industrial visual inspection and microelectronics manufacturing.
Parameter | Air floating linear module（PLM-LP350） | Air floating linear module（PLM-LP400） |
Continuous thrust（N） | 220 | 230 |
Peak thrust（N） | 440 | 460 |
Effective Travel（mm） | 100—1000 | 100—1200 |
Rated load（kg） | 15.0 | 20.0 |
Import air pressure（MPa） | 0.4 | |
Raster resolution（nm） | 25 | |
Accuracy（um） | ±1 | |
Repetitive positioning accuracy（um） | ±0.2 | |
Straightness（um/mm） | ±0.5 | |
Flatness（um） | ±0.5 | |
Maximum speed（mm/s） | 650 | |
►Z-axis high-precision module
The Z-axis high-precision linear module adopts stable and reliable high-precision mechanical guides and high-resolution linear encoders, achieving micrometer level vertical motion control and precise positioning capabilities. The maximum vertical stroke can reach 50mm. This module has the characteristics of high positioning accuracy and fast response speed.
Application conditions:
Suitable for micrometer level vertical motion rapid positioning, it can meet the requirements of high precision and high operational efficiency.
For example, precise positioning of optical modules in testing equipment such as semiconductor wafers, photovoltaic cells, and liquid crystal panels, as well as harsh working conditions such as industrial visual inspection and microelectronics manufacturing that require high-precision positioning, high stability, and large stroke vertical motion requirements.
Parameter | Z-axis high-precision linear module（PLM-LZ50） |
Effective Travel（mm） | 10—50 |
Rated load（kg） | 7.0 |
Encoder resolution（um） | 0.15 |
Accuracy（um） | ±1 |
Repetitive positioning accuracy（um） | ±0.2 |
Straightness（um/mm） | ±0.5 |
Maximum speed（mm/s） | 650 |
Skewed pendulum (arc-sec) |
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