Amid the global semiconductor industry's accelerating evolution towards high-end and intelligent technologies, Chinese domestic enterprises are breaking foreign technological monopolies through independent innovation and promoting the realization of industrial autonomy and control. Huzhou Prim Semiconductor Co., Ltd. (hereinafter referred to as "Prim Semiconductor"), as an innovation pioneer in the domestic semiconductor equipment field, has since its establishment in 2023, focused on nanometer-level ultra-precision motion control technology. By taking core equipment such as precision motion stages, wafer aligners, wafer handling robots, and ceramic wafer forks as its key points, it has built a complete set of precision solutions for the entire wafer processing process, injecting strong momentum into the rise of domestic semiconductor equipment. 

Ceramic plate fork: The "Safety Guard" for Wafer Handling 

In the semiconductor production process, the handling and loading of wafers is one of the key steps that determine the yield of chips. Prim Semiconductor's ceramic wafer forks, with dual innovations in materials and design, have become the "safety guardians" in the wafer handling process. 

From the perspective of material properties, this ceramic wafer fork is made of high-purity alumina or silicon nitride, which features extremely high hardness and wear resistance, effectively preventing the wafer from being scratched during handling. Additionally, the excellent chemical stability of the ceramic material ensures its stable performance under complex conditions such as high temperatures, acids, and alkalis, significantly reducing the risk of wafer contamination. In terms of design, Prim Semiconductor has further enhanced the strength and service life of the wafer fork through precise processing and surface treatment. Its unique structural design also ensures uniform force distribution on the wafer, maintaining its balance. Moreover, the lightweight design of the wafer fork not only reduces the load on the mechanical arm but also improves handling efficiency. It supports various wafer sizes from 125mm to 300mm, meeting the needs of different production scenarios. 

Air flotation rotating shaft: The "core engine" of precise motion 

Nanometer-level precision control is the core requirement of semiconductor manufacturing, and the air-floatation rotating shaft is the key component to achieve this high-precision operation. The air-floatation rotating shaft of Primus Semiconductor, relying on dynamic pressure air bearing technology, has revolutionized the bearing method from "sliding" to "floating". 

Traditional solid contact bearings have problems such as friction and wear, and are prone to vibration, making it difficult to meet the ultra-precision requirements of semiconductor manufacturing. In contrast, the air-floated rotating shaft uses air as the working medium. Through ingenious structural design, it automatically forms an extremely thin air film in the bearing gap when the moving parts rotate at high speed, lifting the rotor and achieving non-contact support. This design not only completely eliminates contact friction, reduces equipment wear, and extends service life, but also effectively reduces vibration and noise, providing a stable ultra-precision environment for wafer processing. In addition, the air-floated rotating shaft, combined with a high-precision grating and readhead detection system, can achieve nanometer-level axial and radial rotation accuracy, as well as microarcsecond-level positioning accuracy, providing reliable motion control for key processes such as wafer cutting, inspection, and grinding. 

Wafer handling robot: The "agile helmsman" of intelligent material handling 

As an important component of the semiconductor production line, the wafer handling robot is responsible for the intelligent and automated transportation of wafers between different processing stations. The wafer handling robot of Prim Semiconductor, through the deep integration of mechanics and electronics, has achieved a dual improvement in handling efficiency and safety. 

This robotic arm is equipped with an advanced intelligent control system that can monitor the position, angle and handling path of the wafers in real time. Through algorithm optimization, it can enhance the speed and accuracy of each movement, maximizing production efficiency while minimizing errors. High-precision sensors and feedback systems enable the robotic arm to maintain high responsiveness under different speeds and loads, adapting to the rapidly changing production environment. In terms of safety protection, the robotic arm is designed with multiple protective measures, effectively reducing the risk of human operation and enhancing the overall safety of the production line. Moreover, with the integration of artificial intelligence technology, this robotic arm is capable of automatically identifying different types of wafers, adjusting handling strategies, and predicting equipment failures through deep learning for timely maintenance, thereby reducing downtime. 

Precision motion stage: The "stable foundation" for wafer positioning 

In the process of wafer handling and processing, the precision motion stage plays a crucial supporting role, and its performance directly affects the accuracy, efficiency and yield of wafer processing. The precision motion stage of Prim Semiconductor, with its high precision, high stability and high load capacity, has become the "stable cornerstone" in the wafer positioning link. 

This motion stage adopts advanced air bearing technology, suspending the load platform through the buoyancy generated by gas, almost eliminating contact friction and ensuring smooth and stable movement. With sub-micron level positioning accuracy, it can meet the extremely high precision requirements in semiconductor manufacturing and other fields. Meanwhile, the motion stage has a strong load capacity, capable of meeting various actual production demands. In design, the precision motion stage fully considers anti-interference, effectively isolating the influence of external vibrations and providing a stable processing environment for wafers. Additionally, the motion stage supports modular customization, allowing for flexible combinations based on different customer needs, and is widely applied in semiconductor, optical, medical, aerospace and many other fields. 

Innovation-driven, leading the new journey of domestic semiconductor equipment 

Since its establishment, Prim Semiconductor has always adhered to independent innovation. With a core team composed of PhDs, masters and industry experts, it has been deeply engaged in the fields of complex robot system control and ultra-precision manufacturing processing. The company has not only built a core equipment system covering the entire process of wafer processing, but also continuously promoted product technology upgrades through continuous R&D investment. Its independently developed air-floatation static pressure technology and nano-interference feedback compensation system have achieved a positioning accuracy of 50 nanometers and a repeat positioning accuracy of 35 nanometers. The new generation of products has further improved the positioning accuracy to within 30 nanometers. 

Against the backdrop of the rapidly evolving global semiconductor industry landscape, Prim Semiconductor is leveraging its core technologies to break foreign technological monopolies and promote the self-reliance and control of domestic semiconductor equipment. In the future, the company will continue to focus on the field of ultra-precision motion control, continuously innovate products and solutions, and contribute more to the high-quality development of China's semiconductor industry.