As semiconductor manufacturing progresses towards 3nm and lower process technologies, the processing accuracy of wafers has been enhanced to the nanometer level, presenting unprecedented challenges to equipment performance. Huzhou PrimTech Semiconductor Co., Ltd. has built a complete nanometer-level technology matrix through its independently developed core equipment such as air-floating rotating shafts, wafer alignment tables, wafer handling manipulators, and wafer calibrators. This not only fills the gap in domestic high-end semiconductor equipment but also drives global semiconductor manufacturing towards higher precision and efficiency. 

Air flotation rotating shaft: The core support for high-precision rotation 

The air-floating rotating shaft is a key component in semiconductor equipment. It employs air bearing technology and utilizes the principles of gas dynamics to achieve non-contact rotation, eliminating the friction and wear problems of traditional mechanical bearings. This design enables the rotating shaft to maintain a nanometer-level jitter even at high speeds, providing stable support for equipment sensitive to vibration such as lithography machines. Prim's air-floating rotating shaft uses an air pressure regulation system to compensate for load changes in real time, ensuring dynamic stability and significantly reducing maintenance frequency, making it suitable for continuous production environments in semiconductor factories. 

Wafer alignment station: The positioning reference for lithography process 

The wafer alignment station is the core component of a lithography machine. It uses high-precision optical sensors and laser measurement technology to continuously monitor the position deviation of the wafer and automatically correct it through a fine-tuning mechanism, ensuring that the wafer is in the optimal position during the processing. Prim's alignment station adopts a six-axis motion platform design and combines piezoelectric ceramic drive technology, achieving nanometer-level positioning accuracy. Additionally, its intelligent feedback system integrates laser interferometers and visual sensors, ensuring an alignment error of less than ±5nm, providing a reliable guarantee for processes below 3nm. 

Wafer handling manipulator: The "arm" for automated transfer 

The wafer handling manipulator is responsible for the transfer of wafers between equipment, and its performance directly affects the production cycle and the wafer damage rate. Prim's manipulator adopts a design combining vacuum suction and mechanical clamping, achieving wafer non-contact grasping through negative pressure adsorption, and combining a flexible clamping mechanism to avoid edge damage. In addition, its path optimization algorithm is based on real-time sensor data, dynamically adjusting the transportation path to avoid collisions with the internal structure of the equipment, and the transmission speed can reach more than 30 wafers per minute, significantly improving production efficiency. 

Wafer calibrator: The key to ensuring processing accuracy 

The wafer calibrator is a crucial step in the wafer processing procedure. It achieves high-precision positioning and calibration of the wafer through the collaboration of a precise mechanical structure and an intelligent control system. Prim's calibrator adopts an air-floating rotating shaft design, eliminating the friction loss caused by traditional mechanical contact and achieving nanometer-level positioning accuracy. Additionally, its anti-pollution design uses a fully enclosed structure combined with a clean gas circulation system to prevent particulate matter from contaminating the optical components, meeting the high cleanliness requirements of semiconductor production. 

Huzhou Prim Semiconductor: Technological Breakthroughs and Industry Impact 

Prim Semiconductor has established a complete nanoscale technology matrix through its own-developed core equipment such as precise motion platforms, air-bearing rotating shafts, wafer transfer systems, and ceramic fork components. Its wafer alignment platform and calibrator technologies have been widely applied in high-end lithography machines and etching machines, significantly enhancing the integration and yield of chips. Moreover, Prim's ceramic fork components are made of high-purity zirconia ceramics, featuring high-temperature resistance and corrosion resistance. The three-point edge clamping design ensures that the wafer does not deform or get damaged during the transfer process. 

Against the backdrop of the continuous growth of the global semiconductor market, Prim Semiconductor's technological breakthroughs not only filled the gap in domestic high-end semiconductor equipment, but also pushed the global semiconductor manufacturing towards higher precision and efficiency. With the surge in terminal demands such as AI computing power, Prim's advanced equipment will provide important support for the continuous development of the semiconductor industry. 

Conclusion

Huzhou Prim Semiconductor Co., Ltd. has become a significant player in the global semiconductor manufacturing industry through the innovation of core technologies such as air-floating rotating shafts, wafer alignment tables, wafer handling manipulators, and wafer calibrators. Its nanoscale precision technology not only enhances the yield and production efficiency of chips but also lays a solid foundation for the future development of the semiconductor industry. In the era driven by AI and high-performance computing, Prim's advanced equipment will continue to lead semiconductor manufacturing towards higher precision and efficiency.