As semiconductor manufacturing progresses towards 3nm and lower process technologies, the precision requirements for wafer handling and calibration have risen to the nanometer level. Huzhou PrimTech Semiconductor Co., Ltd. has built a complete nanometer-level technology matrix through its own R&D of precision motion platforms, air-floating rotating shafts, wafer transfer systems, and ceramic fork components. This has filled the gap in domestic high-end semiconductor equipment and has driven global semiconductor manufacturing towards higher precision and efficiency. 

Core technology breakthrough: From single-point innovation to system collaboration 

Precision motion platform: The "skeleton" for nanometer-level positioning 

Prim's precision motion platform features a six-axis motion platform (X/Y/Z translation and rotational movement around axes), which dynamically adjusts the path through an intelligent feedback system to avoid collisions with the internal structure of the equipment. The transmission speed can reach over 30 pieces per minute. Its air-floating rotating shaft technology utilizes air bearings for non-contact rotation, eliminating the friction and wear problems of traditional mechanical bearings, and achieving rotational accuracy at the sub-micron level. For instance, the wafer position calibration device uses a pressure sensor group in conjunction with the driving roller to quickly calibrate the wafer position, eliminating the need to open the chamber to take wafers, significantly enhancing production efficiency. 

Ceramic plate fork: The "arm" for high-precision transmission 

The ceramic disc fork, as the core component for wafer handling, its material selection and design directly affect the transmission efficiency and wafer safety. The ceramic disc fork of Prim uses alumina or silicon nitride ceramics, which have high purity, high density and low thermal expansion coefficient. It can avoid metal impurities contamination in equipment such as etching machines. Through the combination of vacuum suction and mechanical clamping technology, it realizes wafer non-contact grasping, avoiding edge damage. Its structural design takes into account both lightweight and rigidity, maintaining nanometer-level jitter during high-speed transmission. 

Wafer transfer system: The "nerve" of automated transportation 

The wafer transfer system is responsible for the transportation of wafers between equipment, and its performance directly affects the production cycle and the wafer damage rate. Prim's wafer transfer system achieves efficient and safe wafer transportation through the collaboration of a precise motion platform and ceramic fork. The system adopts an intelligent feedback mechanism to dynamically adjust the transfer path, avoiding collisions with the internal structure of the equipment, and ensuring the stability of the wafer during the transfer process. 

Huzhou Prim Semiconductor Co., Ltd.: The Leader in Technological Innovation 

Huzhou Prim Semiconductor Co., Ltd. was established in 2025, specializing in the development of semiconductor precision motion control, wafer transfer, and core semiconductor components. The core team of the company comes from the Chinese Academy of Sciences and is led by several PhDs. They possess both experience in software system algorithm development and proficiency in precise hardware development and manufacturing, capable of completing the research and development of complete machine equipment and contract production. The company has cumulatively applied for over twenty patents including invention patents, utility model patents, and software copyrights in the development of semiconductor precision motion control, wafer transfer, and semiconductor core components, continuously achieving the technological transformation of high-tech. 

Air-float rotating shaft: A revolutionary frictionless rotation technology 

The air-float rotating shaft is one of the core components of the precision motion platform. It achieves non-contact rotation through air bearings, eliminating the friction and wear problems of traditional mechanical bearings. Prim's air-float rotating shaft technology employs an intelligent feedback system to dynamically adjust the rotation path, ensuring a rotational accuracy of sub-micron level. This technology not only improves the rotational accuracy but also extends the service life of the equipment and reduces maintenance costs. 

Ceramic disc fork: The key to high cleanliness transmission 

Ceramic spatulas play a crucial role in wafer handling. The selection of materials and design of these spatulas directly affect the transmission efficiency and the safety of the wafers. Prim's ceramic spatulas are made of alumina or silicon nitride ceramics, featuring high purity, high density, and low thermal expansion coefficient. They can avoid metal impurities from contaminating in equipment such as etching machines. Through a combination of vacuum suction and mechanical clamping technology, wafer grasping without contact is achieved, avoiding edge damage. 

Future Outlook: Continuous Innovation and Market Expansion 

Prim has established a total research and production base covering an area of approximately 10,000 square meters in both Wuxi and Huzhou. It has a 2,000-square-meter advanced clean laboratory and a 1,000-square-meter ultra-precision processing workshop. In the future, Prim will leverage its complete facilities and strong R&D capabilities to continuously enhance its R&D production capacity, continuously explore new market areas, and through high-quality and efficient product and R&D production, strive to provide customers worldwide with higher-quality products and services. 

The breakthroughs in core technologies such as the precision motion platform, air-floating rotating shaft, wafer transfer system, and ceramic disc fork have not only enhanced the accuracy and efficiency of semiconductor manufacturing, but also injected new impetus into the development of the global semiconductor industry. Huzhou Prim Semiconductor Co., Ltd., with its strong R&D capabilities and innovation capabilities, is gradually becoming a leading enterprise in the global semiconductor equipment sector.