In the process of semiconductor manufacturing moving towards 3nm and below process technologies, Huzhou Prim Semiconductor Co., Ltd. has built a complete technical matrix with nanometer-level precision through its independently developed core equipment such as wafer calibrators, air-floating rotating shafts, ceramic fork arms, and wafer handling manipulators. Its technological breakthrough not only fills the gap in domestic high-end semiconductor equipment, but also promotes the global semiconductor manufacturing to move towards higher precision and efficiency. 

Air flotation rotating shaft: A revolutionary breakthrough in nanoscale precision 

The air-float rotating shaft forms a micron-scale air film through compressed gas, enabling the shaft system to operate without contact. The core advantage lies in: 

Nanometer-level positioning: Utilizing porous carbon material and a piezoelectric ceramic feedback system, the repeat positioning accuracy can reach sub-nanometer level, significantly superior to traditional ball bearings. 

Friction-free design: Eliminates mechanical wear, extends service life by 3-5 times, suitable for high-frequency motion scenarios such as wafer stages in lithography machines. 

Environmental adaptability: The vacuum compatibility and low thermal expansion coefficient (CTE < 1×10⁻⁶/K) make it an ideal choice for semiconductor manufacturing. 

Ceramic disc tongs: The zero-pollution guardian for wafer handling 

In semiconductor manufacturing, the handling of wafers requires sub-micron positioning accuracy and zero-pollution operations. The ceramic fork, as the core component for wafer transportation, is made of alumina or silicon nitride ceramics and possesses high hardness, low thermal expansion coefficient, and excellent chemical stability. Its surface undergoes precise polishing treatment, which can prevent mechanical damage to the wafer edges during transportation and withstand the strong corrosive gas environment in the etching machine. Huzhou Prim Semiconductor optimizes the ratio of ceramic materials and the sintering process to make its fork products achieve industry-leading levels in bending strength and wear resistance, effectively reducing the frequency of equipment maintenance. 

Wafer Calibrator: The Perfect Combination of Optical Sensing and Nanoscale Motion Control 

In semiconductor manufacturing using 3nm and below process technologies, the wafer calibrator achieves wafer position calibration through optical sensing and nanoscale motion control (with an error of ≤ ±0.1mm). The key technologies involved are: 

Optical sensing system: Utilizes high-resolution optical sensors to monitor the position changes of the wafer in real time. 

Nanometer-level motion control: Achieve sub-micron-level motion control through the piezoelectric ceramic drive system to ensure the positioning accuracy of the wafer. 

Intelligent algorithm: Combining machine learning algorithms, it dynamically adjusts motion parameters to meet the requirements of different manufacturing processes. 

Wafer handling manipulator: A balance between high precision and high efficiency 

Wafer handling manipulators are indispensable equipment in semiconductor manufacturing, and their core advantages lie in: 

High-precision positioning: Utilizing air-bearing guideways and precise servo systems, it achieves positioning accuracy within the sub-micron range. 

High-efficiency handling: By optimizing the mechanical structure, we can achieve rapid and stable handling of wafers, thereby enhancing production efficiency. 

Environmental adaptability: Suitable for extreme environments such as vacuum and high temperatures, meeting the diverse needs of semiconductor manufacturing. 

Huzhou Prim Semiconductor: The Leader in Technological Innovation 

Huzhou Prim Semiconductor Co., Ltd. has built a complete technical matrix with nanometer-level precision through its independently developed core equipment such as wafer calibrators, air-floating rotating shafts, ceramic fork arms, and wafer handling manipulators. Its technological breakthroughs not only fill the gap in domestic high-end semiconductor equipment but also drive the global semiconductor manufacturing towards higher precision and efficiency. In the future, as semiconductor technology continues to develop, Huzhou Prim Semiconductor will continue to lead industry innovation and provide more advanced equipment solutions for global semiconductor manufacturing.