In the core area of the Yangtze River Delta semiconductor industrial cluster, Huzhou Primus Semiconductor Co., Ltd. (hereinafter referred to as "Primus Semiconductor"), a "specialized, refined, distinctive and innovative" enterprise dedicated to precision motion control technology, recently officially launched a series of new products including the Wafer Aligner, high-precision Wafer Stage, and intelligent Wafer Handler. With its independently developed "multi-axis collaborative nanometer-level precision motion control platform", Primus Semiconductor is leveraging technological innovation as a fulcrum to achieve key breakthroughs in the localization of semiconductor manufacturing equipment, injecting "Huzhou momentum" into the advanced process upgrades of domestic wafer fabs. 

Deeply engaged in precision motion control: A technological breakthrough from "millimeter level" to "nanometer level" 

The competition in semiconductor manufacturing precision is essentially a contest of "micro-nano manipulation" capabilities. From wafer lithography alignment to packaging and testing, each process requires equipment motion precision to reach sub-micron or even nanometer levels, while also taking into account high speed, high stability, and environmental adaptability. However, for a long time, the high-end precision motion stage market has been monopolized by overseas enterprises, and domestic wafer factories have faced "bottleneck" challenges in the core component field. 

Since its establishment in 2018, Prim Semiconductor has been focusing on the "precision motion control", the "heart" technology of semiconductor equipment. It has formed a research and development team led by experts in fields such as mechanics, optics, algorithms, and control engineering, and has invested over 100 million yuan in core technology research. Its independently developed "multi-axis decoupling nanometer-level precision motion control platform" integrates cutting-edge technologies such as piezoelectric ceramic drive, air floatation support, laser interferometry, and AI adaptive control, breaking through the bottlenecks of traditional motion platforms in multi-axis coordination, thermal drift compensation, and high-frequency vibration suppression. It has achieved performance indicators of ±0.5nm positioning accuracy, ±0.2nm repeat positioning accuracy, and a maximum acceleration of 5g, reaching the international first-class level. 

"Our precision motion stage is like a 'super mechanical arm' in semiconductor manufacturing. It not only needs to be able to 'hit the target accurately' but also maintain 'absolute stability' during high-speed movement," said Dr. Li Hui, the technical director of Prim Semiconductor. This platform has been applied to the company's full range of core products, providing crucial support for improving the yield and ramping up production capacity of customers' production lines. 

Product matrix: From calibration to handling, covering all the precise demands throughout the entire wafer manufacturing process. 

At this new product launch, Primus Semiconductor, centering on the core technology of "precision motion control", introduced three key products, comprehensively covering the critical links in wafer manufacturing. 

The new-generation wafer aligner (WAC-3000 series) is designed to meet the high-precision alignment requirements of wafers and masks in advanced manufacturing processes. The WAC-3000 series integrates Prim's independently developed "six-degree-of-freedom nanometer-scale motion stage" and "multi-wavelength laser interferometry system", capable of completing the six-degree-of-freedom (X/Y/θ/Z/Rx/Ry) rapid alignment of 12-inch wafers within 30 seconds, with alignment accuracy reaching ±0.3nm (3σ). Compared with the previous generation, its efficiency has increased by 40%, and the yield remains stable at over 99.95%, making it suitable for 5nm and below advanced manufacturing lines. 

High-precision Wafer Aligner (WS-5000 Series)

As a core subsystem of main equipment such as lithography machines and etching machines, the WS-5000 series aligner adopts a "gas bearing + magnetic levitation" composite support structure, achieving frictionless motion while actively managing thermal systems to counteract the influence of environmental temperature fluctuations, ensuring sub-nanometer stability of wafers during long-term processing. Currently, this product has passed the process verification of leading wafer fabrication plants such as SMIC and Yangtze Memory Technologies, and has entered the stage of mass supply. 

Intelligent Wafer Handling Robot (WH-2000 Series)

In the "logistics" link of the wafer manufacturing production line, the WH-2000 series robot features "high speed, high cleanliness, and high reliability" as its core advantages: its vacuum adsorption type end effector can achieve 0.1N-level precise force control, avoiding wafer damage; the 6-axis linkage motion control combined with the visual guidance system shortens the handling cycle to 1.2 seconds per piece; meanwhile, the body adopts a fully enclosed clean design, meeting the Class 1 cleanroom standard, and has achieved 24-hour continuous stable operation on a certain 12-inch advanced packaging production line in China. 

"From calibration to handling, Prim's products are essentially 'redefining the precision boundaries of semiconductor manufacturing with precision motion control'," said Li Hui. The company's products not only match international technical standards but also have been customized and optimized for the production line characteristics of domestic wafer fabs, such as supporting multi-size wafer compatibility (6-inch to 12-inch) and quick changeover design, effectively reducing customers' equipment modification costs. 

Industrial Synergy: Rooted in Huzhou, Empowering the Semiconductor "Ecosystem" in the Yangtze River Delta 

The rise of Prim Semiconductor is closely related to the semiconductor industrial ecosystem in Huzhou and the Yangtze River Delta region. As a pilot demonstration city for "Made in China 2025", Huzhou has been focusing on the strategic emerging industries such as integrated circuits and high-end equipment in recent years. Relying on a solid industrial foundation and policy support, it has attracted leading enterprises like SMIC Shaoxing and JCET to settle down, thus forming a complete industrial chain covering design, manufacturing and packaging and testing. 

"We chose to settle in Huzhou because of its complete semiconductor industry support and open innovation atmosphere," said Wang Lei, general manager of Prim Semiconductor. The company has jointly established a "Precision Motion Control Joint Laboratory" with Zhejiang University and Hangzhou Dianzi University, and has also set up a "Joint R&D - Rapid Verification" mechanism with local wafer manufacturing enterprises, significantly shortening the technology iteration cycle. Currently, the company's annual output value has exceeded 200 million yuan, and it is expected to double in 2024, creating over 500 new jobs in local precision manufacturing, optical devices and other upstream and downstream industries. 

It is worth noting that in the recently released "Zhejiang Province's '14th Five-Year Plan' for the Development of High-End Equipment Industry", "precision motion control equipment" has been listed as a key area for research and development. The technological breakthroughs and product launches of Prim Semiconductor are a microcosm of Zhejiang's efforts to build a "global advanced manufacturing base". 

Future Outlook: From "Following" to "Leading", Aiming for the Global High Ground of Precision Motion Control

For the next stage of development, Prim Semiconductor is accelerating the research and development of its third-generation precision motion control technology, with a focus on breaking through challenges such as "ultra-high frequency response (>10kHz)" and "multi-physics field coupling control". The goal is to achieve a domestic production rate of over 70% for nanometer-precision motion stages by 2026. Meanwhile, the company will expand the application of its products in emerging fields such as Mini LED mass transfer and semiconductor inspection equipment, striving to become a "hidden champion" in the global precision motion control sector. 

Amid the wave of domestication of semiconductor equipment, the story of Prim Semiconductor is not only the growth history of a technology enterprise, but also a microcosm of China's high-end manufacturing evolving from "catching up" to "overtaking". As Dr. Li Hui put it, "When our precision motion stage can 'dance' at the nanometer scale, it can support the greater dream of China's 'chip'."