With the continuous progress of science and technology, the importance of precision motion table in the field of semiconductor manufacturing is becoming increasingly prominent. It not only plays a key role in improving production efficiency, but also is one of the core equipment to ensure product quality. This article will discuss in detail the design of precision motion tables and the application of related technologies such as ceramic wafer forks and wafer calibrators, especially the contributions and innovations of an industry pioneer, Prim Semiconductor.

First, the basis and importance of precision motion table design

Precision motion tables are high-precision devices used in semiconductor manufacturing processes to support, position, and move materials such as silicon wafers. The basic elements of its design include a high-precision motion control system, a stable support structure and a highly sensitive position feedback mechanism. The design of the motion table not only ensures high reliability and durability in the manufacturing environment, but also takes into account the impact of temperature changes, vibration and other external factors on the accuracy of the motion.

1. Motion control system

Motion control system is the core of precision motion table, which usually adopts closed-loop feedback mechanism to monitor the motion state through high-precision sensor and adjust the motion path in real time. Common motion control technologies include stepper motor, servo motor and linear motor. Servo motor is widely used in motion table design because of its high speed and high precision. In addition, the motion control algorithm based on microcontroller also greatly improves the motion stationarity and response speed.

2. Material selection

The material selection of the sports table is very important, and aluminum alloy, composite materials and high-strength steel are usually used. These materials need not only excellent mechanical properties, but also good thermal stability and corrosion resistance. Some high-end sports tables have begun to use ceramic and carbon fiber materials to further improve stability and reduce thermal deformation.

3. Structural design

The structural design of the sports table is usually modular in order to facilitate later maintenance and upgrading. The weight distribution and center of gravity position of the platform directly affect the accuracy and stability of the motion, so various factors should be considered comprehensively in the design to ensure the performance of the motion table under various working conditions. In order to improve the rigidity of the overall structure, some designs will also introduce finite element analysis to verify the strength and stiffness of the structure.

Second, the innovative application of ceramic wafer fork

Ceramic wafer fork is an important tool for holding and handling wafer, and its design requires high precision and high temperature stability. Ceramic materials have become ideal clamping materials because of their high strength and low thermal expansion characteristics. Compared with metal fixtures, ceramic fixtures can effectively reduce the risk of wafer contamination and reduce mechanical damage to the wafer surface.

1. Advantages of ceramic materials

Ceramic materials not only have excellent mechanical properties and thermal stability, but also have a very low coefficient of thermal expansion, which helps to ensure the stability of wafers at high temperatures. In addition, the corrosion resistance and chemical stability of ceramic materials are key to their application in the semiconductor industry. Common ceramic materials include silicon nitride (Si3N4) and alumina (Al2O3), both of which are widely used in the production of wafer forks.

2. High-precision manufacturing process

The manufacturing process of ceramic wafer fork is relatively complex, usually using injection molding, sintering and other high-precision processing technology. Through advanced CNC machining and laser cutting technologies, manufacturers are able to produce highly precise clamping tools to meet the stringent requirements of modern semiconductor manufacturing. In addition, surface treatment technologies such as coating and polishing can further enhance the performance and service life of the fixture.

3. The development of clamping technology

With the continuous progress of manufacturing technology, the holding technology of ceramic wafer fork is also constantly innovative. Modern fixture design tends to use smart sensors and automation technology to achieve intelligent wafer identification and precise clamping. This not only improves the production efficiency, reduces the error caused by manual operation, but also improves the safety and reliability of the overall production.

The necessity of wafer calibrators in semiconductor manufacturing

Wafer calibrators are key devices used to ensure that wafers are in the correct position during processing. Its role includes adjusting the transverse and longitudinal position of the wafer and ensuring its alignment accuracy with the mask. This is of great significance for improving the yield of semiconductor devices.

1. The working principle of the calibrator

Wafer calibrators are usually positioned using laser technology and high-precision sensors. The detection system is able to monitor the wafer position in real time and make timely adjustments according to the set parameters to ensure high precision during processing. In addition, many calibrators integrate automation software, making the operation process more efficient and reducing the complexity of manual operation.

2. Improved calibration accuracy

Modern wafer calibrators generally use multi-sensor fusion technology to obtain multi-dimensional information and improve the accuracy of position recognition. In addition, some advanced calibrators have introduced machine learning algorithms that can self-optimize calibration strategies based on historical data to suit the needs of different production lines.

3. Industrial application cases

In the production process of Prim Semiconductor, precision wafer calibrators are widely used in the manufacture of various semiconductor devices. From front-end process to back-end packaging, wafer calibrators play an important role in every link. High-precision position adjustment ensures the close cooperation of every link, improves the overall production efficiency and yield, and becomes an indispensable part of the industry.

Fourth, the application prospect of precision air floating movement platform

Precision air floating motion platform is a kind of high-tech motion adjustment equipment, which is widely used in semiconductor, optical and precision manufacturing fields. The air float technology forms a gas film between the platform and the working object through the air supply system, so as to achieve the motion effect of non-contact state. This not only reduces mechanical friction, but also enables higher dynamic response and motion accuracy.

1. Key points of design of air floating platform

The design of precision air floating motion platform needs to consider many aspects such as airflow control, load bearing and motion control. The uniformity of the gas film is as critical as the rigid design of the platform. In addition, precision air floating motion platforms often employ multi-axis control systems to achieve more complex motion requirements.

2. Technical application and advantages

In the semiconductor industry, the advantages of air floating motion platforms are mainly reflected in their ultra-precise motion control and environmental adaptability. Since there is no mechanical contact, the air floating platform can avoid various problems caused by friction, such as wear and thermal deformation. At the same time, the air float platform can still maintain high performance in vacuum or low temperature environment to meet the demanding production needs.

3. Future development trend

With the rise of intelligent manufacturing, the air floating movement platform will gradually develop in the direction of intelligence and automation. Through the application of the Internet of Things technology, the future air floating movement platform can not only perform real-time data monitoring and feedback, but also optimize the production process through data analysis to achieve more efficient manufacturing.

Sum up

The design of the precision motion table, the application of the ceramic wafer fork, the precise control of the wafer calibrator and the innovation of the floating motion platform are all important forces driving the semiconductor manufacturing industry forward. In the future, with the further development of materials science and manufacturing technology, these technologies will continue to evolve, helping the semiconductor industry to achieve higher production levels and lower energy consumption, and promoting the entire industry to the direction of intelligence and automation.

With the continuous exploration and innovation of industry leaders such as Prim Semiconductor, we have reason to believe that the semiconductor industry will be more brilliant tomorrow.