Background introduction:

1. The ± 50nm ultra precision air suspension platform is currently one of the high-performance air suspension linear platforms in China. It can be used as a single axis or assembled into a system with other axes according to application. It is widely used in precision machining, testing and measurement, scanning, semiconductor and photonics industries.

2. The entire system is composed of non-contact air floating guide rails, linear motor drive, and grating ruler feedback device, which can operate without maintenance. Because there is no mechanical contact between the moving components, over time, there will be no wear or performance degradation, resulting in a long service life.

3. The air floating guide rail does not require lubrication, only clean and dry gas, making it an ideal choice for customer applications.

4. The air floating guide rail is based on the gas dynamic static pressure effect, achieving smooth movement without friction and vibration. Compared with the friction type guide rail, the straightness, flatness and other indicators of the air floating platform have been greatly improved. At the same time, due to non-contact, the servo feedback tracking error has made a qualitative leap, and the positioning accuracy and repeated positioning accuracy have been significantly improved.

Solution for Nanoscale Air Floatation Platform Wafer Detection System:

The process steps that require precise positioning all require high-precision motor drive control and guide rails. To achieve perfect positioning in a very short exposure time, wafer cutting requires precise mechanical operation and real-time positioning correction. The nano level ultra precision air floating platform, driven by a non-contact air floating guide rail structure and a linear motor, ensures ideal cutting straight lines with high flatness indicators. At the same time, it can achieve high dynamic response and fast position adjustment, achieving extremely high-speed motion and long-lasting stable operation. It is an ideal choice in precision applications such as semiconductor wafer cutting.

After years of technological accumulation and precipitation in precision motion platforms, a complete set of research and production systems for precision motion platforms has been formed, especially with strong capabilities in air flotation theory calculation, structural optimization design, precision integrated assembly and testing.